EE-650: Reliability Physics of Nanoelectronic Devices

Handouts

All handout files can be found in the downloads directory or can be accessed using the links below.

Lecture Notes

Lecture 1-3: Empirical, Statistical, and Physical Basis of Reliability
• Lecture1: Introductory Lecture
• Lecture2: Empirical Models
• Lecture3: Physical Model for Lifetime Projection
• Matlab Code: Fish in a river with a waferfall

Lecture 4-6: Statistics: Why and How
• Lecture4: Statistical Projection
• Matlab Code: Hazen Formula
• Lecture5: Nonparametric Estimates
• Lecture6: Distribution Function/Goodness-of-fit
• Matlab Code: Maximum Likelihood Methods
  Other files: Run_fitting.m, Fit_gaussian.m, Fit_Weibull.m, fden.dat, and Fdist.dat in the "Download" section.

Lecture 7-13: Intro to Microelectronics Reliability, Negative Bias Temperature Instability
• Lecture7: Reliability in Microelectronics
• Lecture8: Empirical Observation regarding NBTI
• Lecture9: Time-Dependence - Stress/Relaxation
• Lecture10: Time-Dependence - Freq. Indepedence
• Lecture11: Temperature Dependence of Diffusion Coefficient
• Lecture12: Temperature Dependence of Dissociation Rates
• Lecture13: Field-Dependence and NBTI Statistics
• Homework: NBTI Exercise Using DevRel Code (Nanohub Code)
• Matlab Code: Statistical Distribution of NBTI Failure
  

Lecture 14-17: Characterization Methods for Interface Traps

• Lecture14: Subthreshold and Idlin Methods
• Lecture15: DC-IV and CP-Methods: Notes 1 Notes 2
• Lecture16: Spin-Dependent Recombination Method
• Lecture17: Comparison of NBTI Characterization Methods
• Quiz: A Short Quiz on NBTI Based on Lectures 7-17

Lecture 17-27: Theory of Dielectric Breakdown

• Lecture 18: Introduction to Dielectric Breakdown
• Lecture 19: Trapping Kinetices of Thick Oxides
• Lecture 20: Field Dependent Dielectric Breakdown
• Lecture 21: Application of Anode Hole Injection Theory
• Lecture 22: Statistics of Oxide Breakdown
• Matlab Code: Cell Based Percolation (Lecture 22)
• Lecture 23: Measurement Techniques for Bulk Traps
• Lecture 24: Criteria of Soft and Hard BD
• Lecture 25: Statistics of Soft BD and Markov Chain
• Quiz and HW: Based on Lectures 21-26 AND Solution to Selected Problems
• Lecture 27: Extrinsic vs. Intrinsic BD

Lecture 28-31: Physics of Hot Carrier Degradation

• Lecture 28: Introduction to HCI Degradation
• Lecture 30: Time-Dependence of HCI Degradation
• Lecture 31: Field-Dependent HCI Degradation
• Lecture 32: Temperature-Dependence HCI Degradation and Conclusion

Final Projects